JPH0714363Y2 - プラズマ処理装置 - Google Patents

プラズマ処理装置

Info

Publication number
JPH0714363Y2
JPH0714363Y2 JP1987115664U JP11566487U JPH0714363Y2 JP H0714363 Y2 JPH0714363 Y2 JP H0714363Y2 JP 1987115664 U JP1987115664 U JP 1987115664U JP 11566487 U JP11566487 U JP 11566487U JP H0714363 Y2 JPH0714363 Y2 JP H0714363Y2
Authority
JP
Japan
Prior art keywords
sample table
substrate
plasma
notch
plasma processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987115664U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6422772U (en]
Inventor
秀樹 藤本
Original Assignee
日電アネルバ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日電アネルバ株式会社 filed Critical 日電アネルバ株式会社
Priority to JP1987115664U priority Critical patent/JPH0714363Y2/ja
Publication of JPS6422772U publication Critical patent/JPS6422772U/ja
Application granted granted Critical
Publication of JPH0714363Y2 publication Critical patent/JPH0714363Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP1987115664U 1987-07-28 1987-07-28 プラズマ処理装置 Expired - Lifetime JPH0714363Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987115664U JPH0714363Y2 (ja) 1987-07-28 1987-07-28 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987115664U JPH0714363Y2 (ja) 1987-07-28 1987-07-28 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS6422772U JPS6422772U (en]) 1989-02-06
JPH0714363Y2 true JPH0714363Y2 (ja) 1995-04-05

Family

ID=31357525

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987115664U Expired - Lifetime JPH0714363Y2 (ja) 1987-07-28 1987-07-28 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPH0714363Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61123128A (ja) * 1984-11-07 1986-06-11 Fujitsu Ltd プラズマ反応装置

Also Published As

Publication number Publication date
JPS6422772U (en]) 1989-02-06

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